In the 1920s, the purification requirements for the production environment were first put forward in the gyroscope manufacturing process of the American aviation industry. A "control assembly area" has been set up in the manufacturing workshop and laboratory to supply a certain amount of filtered air. In the Korean War, the United States found that the main reason for the failure of electronic instruments was the dust, which contributed to the start of air purification technology.

1957年，前蘇聯(lián)顆人造衛(wèi)星的升空，刺激了美國加速發(fā)展宇航事業(yè)，制定了阿波羅登月計劃，其電子控制儀器和精密機械加工環(huán)境均要求凈化，因而促進了凈化技術的大發(fā)展，建造了百級潔凈室，誔生了個潔凈室標準。

In 1957, the launch of the first Sputnik in the former Soviet Union stimulated the accelerated development of aerospace industry in the United States. The Apollo moon landing program was formulated. The electronic control instruments and precision machining environment required purification, thus promoting the development of purification technology. A hundred level clean room was built, and the first clean room standard was born.

1970年，1K位的集成電路開始大規(guī)模生產，使凈化技術的發(fā)展突飛猛進。20世紀80年代，大規(guī)模和超大規(guī)模集成電路的生產，使空氣凈化技術有了進一步的發(fā)展，集成電路的更細光刻線寬達到2~3um。在70年代末和80年代初，美國、日本研制出0.1um級空氣過濾器，為潔凈度的提高創(chuàng)造了條件。

In 1970, the large-scale production of 1K bit integrated circuit started, which made the development of purification technology rapidly. In the 1980s, the production of large-scale and super large-scale integrated circuits made the air purification technology further developed, and the thinnest optical linewidth of integrated circuits reached 2-3um. In the late 1970s and early 1980s, the United States and Japan developed a 0.1um class high efficiency air filter, which created conditions for the improvement of cleanliness.

In the 1990s, the production of VLSI has made new progress. The narrowest optical linewidth has developed from the micron level in the 1980s to the submicron level. By the end of the 20th century, it is required to reach 0.1-0.2um, and the integration degree is 1km. The higher the integration degree of integrated circuit, the smaller the photolithography linewidth required, the smaller the dust particle size required to be controlled, and the smaller the number of dust particles. Nowadays, it is very common to require 0.1um10 class cleanliness. In the future, the required cleanliness will be higher and the application field of clean room will be wider.

在2001年中國科協(xié)學術年會上，楊振寧教授指出，在今后三四十年，三個領域將成為科技發(fā)展的“火車頭”：① 芯片的廣泛應用。 ②醫(yī)學與藥物的高速發(fā)展。③ 生物工程。芯片需在工業(yè)潔凈室中生產，藥品需在生物潔凈室中生產，醫(yī)學研究、生物工程都離不開生物潔凈室。對于有生物學危險的操作，需要在生物安全潔凈室中進行。工業(yè)潔凈室、生物潔凈室及生物安全潔凈室，都是應用空氣凈化技術創(chuàng)造的特殊的微環(huán)境。

In 2001, Professor Yang Zhenning pointed out that in the next 30 to 40 years, three fields will become the "locomotive" of scientific and Technological Development: ① the wide application of chips. ② The rapid development of medicine and medicine. ③ Bioengineering. Chips need to be produced in the industrial clean room, drugs need to be produced in the biological clean room, medical research and bioengineering are inseparable from the biological clean room. For operations with biological hazards, they need to be carried out in the biosafety clean room. Industrial clean room, biological clean room and biosafety clean room are all special micro environments created by air purification technology.

電子產業(yè)的飛速發(fā)展，將推動中國凈化技術向高水平發(fā)展，而醫(yī)學與藥物的快速發(fā)展，必將使空氣凈化技術的應用更加廣泛。中國在制藥行業(yè)實施GMP（Good Manufacturing Prac-tice）認證制度以來，生物潔凈室的興建像雨后春筍，給凈化技術產業(yè)帶來的繁榮。近年來，三級甲等醫(yī)院紛紛建造潔凈手術部，使術后感染率降低10倍以上，從而可以少用或不用抗生素，減輕了抗生素對患者造成的傷害。這也將進一步拓寬凈化技術的應用領域。

The rapid development of electronic industry will promote the development of China's purification technology to a high level, and the rapid development of medicine and medicine will make the application of air purification technology more extensive. Since the implementation of GMP (good manufacturing prac tice) certification system in the pharmaceutical industry in China, the construction of biological cleanrooms has mushroomed, bringing unprecedented prosperity to the purification technology industry. In recent years, the third class A hospitals have built clean operating departments, which can reduce the postoperative infection rate by more than 10 times, so that antibiotics can be used less or not, reducing the harm of antibiotics to patients. This will further expand the application of purification technology.

2003年SARS病素肆虐，使人們對空氣傳播病毒的危險性有了深刻的認識。更值得反思的就是醫(yī)院建筑，不僅要注重建筑外形與使用功能，更應該關注建筑內的空氣品質。據了解，人吃進1億個兔熱桿菌才感謝染，若吸入10~50個就發(fā)熱。這給只重視接觸感染而輕視氣溶膠傳播的呼吸道感染的醫(yī)護人員敲響了警鐘。因為氣溶膠傳播更具有爆發(fā)性、低感染劑量和大范圍的特點，危險性極大。因此，現代醫(yī)院建筑應有空氣凈化設備，才能保證醫(yī)患人員的安全。應裝配空氣凈化系統(tǒng)的醫(yī)院建筑有：潔凈手術部、生物治療實驗室、傳染病人隔離室、營養(yǎng)液配制、制劑、無菌物品供應等。這將給凈化技術的應用帶來新的機遇。

In 2003, SARS was rampant, which made people have a deep understanding of the risk of air borne virus. The most worthy reflection is the hospital building, which should not only pay attention to the shape and function of the building, but also the air quality in the building. It is understood that people eat 100 million rabbit thermobacilli to thank for infection, if inhaled 10-50, they will get fever. This is a wake-up call for medical staff who only pay attention to exposure to infection and despise aerosol borne respiratory tract infection. Because aerosol transmission is more explosive, low infection dose and large-scale, it is very dangerous. Therefore, modern hospital buildings should have air purification equipment to ensure the safety of doctors and patients. The hospital buildings that should be equipped with air purification system include: clean operation Department, biological treatment laboratory, isolation room for infectious patients, nutrient solution preparation center, preparation center, sterile supplies center, etc. This will bring new opportunities to the application of purification technology.

在21世紀，生物工程對人類的直接影響將超過芯片，而其發(fā)展離不開空氣凈化技術。如生物工程中有相當一部分操作存在潛在危險性，特別是存在可能具有未知毒性的微生物新種傳播生物學危險。這就需要提供具有生物安全的建筑微環(huán)境，可利用空氣凈化技術、生物安全知識來建造生物安全潔凈室來控制這種具有生物學危險的污染的傳播。

In the 21st century, the direct impact of bioengineering on human beings will exceed that of chips, and its development cannot be separated from air purification technology. For example, in bioengineering, there are potential risks in a considerable part of operations, especially in the transmission of new microbial species with unknown toxicity. Therefore, it is necessary to provide a building micro environment with biosafety. Air purification technology and biosafety knowledge can be used to build biosafety clean rooms to control the spread of this biologically dangerous pollution.